TX-2020DI SEI

TX-2020DI SEI

機 台 型 號: TX-2020DI SEI

機台出廠前均會進行完整測試SOP，以確認正常使用下均能正常運作。

訂購請洽詢客服

  • TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
  • Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
  • High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, Fluorinert®, HFE™
  • User-friendly touch panel display with multiple functions
  • Small foot print
  • Multiple interfaces(LAM, AMAT-CHX)

TX-2020DI SEI Specification

Item

Dual Chiller Model

spec

CH 1

CH 2

1

Fluid

DI+EG

DI+EG

2

Temp. Range (deg.C)

30~+80degC

-20~+60degC

3

Max Cooling Capacity
KW @ ℃

2KW(at 40℃ 60Hz)

2KW(at 10℃ 60Hz)

4

Max Heating Capacity
KW @ ℃

3Kw

2Kw

5

Pump capacity
GPM @ Psi(60Hz)

20 liter/min at 4kg/cm2

20 liter/min at 4kg/cm2

6

Power (Voltage/Current)

3-phase  208V，50A

7

Power Consumption
(KW )

4.7KW/h

5.7KW/h

8

 Safety Design
1.Over Current sensor
2.Leak Sensor

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

9

防漏設計

All stainless pump

All stainless pump

10

節能設計
1. Heat Exchanger
2. Pump
3. Heater

1.多餘冷量與PCW進行熱交換
2.變頻
3.PID調整功率           

1.多餘冷量與PCW進行熱交換
2.變頻
3.PID調整功率           

11

Pump Type/
Power Consumption

1.1KW

1.1KW

12

Chiller Control Method

PID

PID

13

DI Tank

Y

Y

14

是否需定期更換Filter

N

N

15

Size(W*D*H)

660*960*1500mm

660*960*1500mm

16

CXF prevention

Y

Y

17

Fluid purge function

N

N

18

符合規範之 SEMI-S2

Y

Y