TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, ...
Super Chiller with huge cooling capacity
User-friendly touch panel display
Compact footprint
Environmentally friendly
SEMI S2 and F-47 compliant
Central monitoring system (CMS) (Optional)
&n...
TX-30S is designed to meet 200mm and 300mm OEM tool specifications
Single Channel heat exchanger
High temperature dual coolan compatible DI/EG or Galden®/Fluorinert®
User-friendly touch panel displa...
TX Series is designed to meet 200mm and 300mm OEM tool specifications
Wide temperature range(-10℃ ~ +65℃)
Circulating fluid DI/EG.
All stainless pump
User-friendly touch panel display with mul...
TX Series is designed to meet 200mm and 300mm OEM tool specifications
Wide temperature range(-20℃ ~ +80℃)
Circulating fluid DI/EG, Galden®, or FluorinertTM compatible.
Magnetically coupled ...
TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, ...
TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, ...
Super Chiller with huge cooling capacity
User-friendly touch panel display
Compact footprint
Environmentally friendly
SEMI S2 and F-47 compliant
Central monitoring system (CMS) (Optional)
&n...
TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, ...
Super Chiller with huge cooling capacity
User-friendly touch panel display
Compact footprint
Environmentally friendly
SEMI S2 and F-47 compliant
Central monitoring system (CMS) (Optional)
&n...
