TX-2020

TX-2020

機 台 型 號: TX-2020

機台出廠前均會進行完整測試SOP，以確認正常使用下均能正常運作。

訂購請洽詢客服

  • TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
  • Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
  • High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, Fluorinert®, HFE™
  • User-friendly touch panel display with multiple functions
  • Small foot print
  • Multiple interfaces(LAM, AMAT-CHX)