TX-H30KWT

TX-H30KWT

機 台 型 號: TX-H30KWT

機台出廠前均會進行完整測試SOP，以確認正常使用下均能正常運作。

訂購請洽詢客服

  • Water/Water heat exchanger. huge cooling capacity
  • User-friendly touch panel display
  • Small foot print
  • Environmentally friendly
  • SEMI S2 and F-47 complaint
  • Central monitoring system(CMS)(Optional)

TX-H30KWT SPECIFICATION SHEET

Temp. control

Temp. range

+30℃~+65℃

（@Facility Water +18℃~+20℃）

Temp. accuracy

≤±1℃

Ramp up time

< 0.5 hrs (30℃ → 65℃)

Temp. controller

Pt100　PID control

Heat medium

DI Water（With filter 10inch*2）

Cooling unit

Cooling capacity

30kw @ in+42.5℃ out+30℃

Plate heat exchanger

All stainless

Facility water

> 40Liter/min  >0.2Mpa; at in+20℃ out+32.5℃

Heater

Capacity

15KW

Pump

Pump unit

Centrifugal Pump

Motor

1.2kw

Capacity

40 liter/min at 0.4Mpa 60Hz

Flow sensor

0~100L/min

Safety device

High temp.

Thermostat

Empty protection

Float switch

Low level

Float switch

Upper limit

Float switch

Pump overload

Thermal relay

Low Flow

Flow sensor

Pump　puressure

Puressure　sensor

Front panel inter-lock

Breaker Switch

Sensor protection

Abnormal sensor diagnosing

Emergency stop

EMO switch

Circuit　breaker

Over-current breaker

Piping connection

Coolant inlet

Rc 1 inch

Coolant outlet

Rc 1 inch

Facility Water inlet

Rc 1 inch

Facility Water outlet

Rc 1 inch

Auto supply

Rc 1/2 inch

Drain

Rc 1 inch + Hand Valve

Drain pan drain

Rc 1/2 inch

Over flow

Rc 1/2 inch

Bypass valve

1/2 inch

Tank

100L

Outer dimensions

W:660xD:960xH:1500mm

Power supply

 3Phase 208VAC 60A（Main breaker）