TX-30S

機 台 型 號: TX-30S

機台出廠前均會進行完整測試SOP,以確認正常使用下均能正常運作。

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  • TX-30S is designed to meet 200mm and 300mm OEM tool specifications
  • Single Channel heat exchanger
  • High temperature dual coolan compatible DI/EG or Galden®/Fluorinert®
  • User-friendly touch panel display with multiple functions
  • Small foot print
  • Multiple interfaces(LAM, AMAT-CHX)