TX-2020DI

TX-2020DI

Product Code: TX-2020DI

Before the company factory equipment are thoroughly tested in normal use and can be normal operation

For more details, please contact customer service

  • TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
  • Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
  • High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, Fluorinert®, HFE™
  • User-friendly touch panel display with multiple functions
  • Small foot print
  • Multiple interfaces(LAM, AMAT-CHX)

TX-2020DI Specification

Item

Dual Chiller Model

spec

CH 1

CH 2

1

Fluid

DI+EG

DI+EG

2

Temp. Range (deg.C)

-20~+80degC

-20~+80degC

3

Max Cooling Capacity
KW @ ℃

3Kw(@ 15℃ 60Hz)

6Kw(@ 10℃ 60Hz)

4

Max Heating Capacity
KW @ ℃

4.5KW

7.5KW

5

Pump capacity
GPM @ Psi(60Hz)

20 liter/min at 4kg/cm2

20 liter/min at 4kg/cm2

6

 Power (Voltage/Current)

3-phase  208V，75A

7

Power Consumption
(KW )

4.7KW/h

5.7KW/h

8

 Safety Design
1.Over Current sensor
2.Leak Sensor

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

9

Leakage Prevention

submerged  pump

submerged  pump

10

Energy Saving Design
1. Heat Exchanger
2. Pump
3. Heater

1.Extra Cool Energy Exchange with PCW

2.frequency conversion

3.PID control           

1.Extra Cool Energy Exchange with PCW

2.frequency conversion

3.PID control

11

Pump Type/
Power Consumption

CDLKF4-60  2.2KW

CDLKF4-60  2.2KW

12

Chiller Control Method

PID

PID

13

DI Tank

Y

Y

14

Filter Change

N

N

15

Size(W*D*H)

660*960*1500mm

660*960*1500mm

16

CXF prevention

Y

Y

17

Fluid purge function

N

N

18

SEMI-S2

Y

Y