TX-2020GL

TX-2020GL

機 台 型 號: TX-2020 GL

機台出廠前均會進行完整測試SOP，以確認正常使用下均能正常運作。

訂購請洽詢客服

  • TX-2020 is designed to meet 200mm and 300mm OEM tool specifications
  • Dual Channel Heat Exchanger/Chiller ( or Chiller/Chiller)
  • High temperature and huge cooling capacity by using coolan Galden®. H-Galden®, Fluorinert®, HFE™
  • User-friendly touch panel display with multiple functions
  • Small foot print
  • Multiple interfaces(LAM, AMAT-CHX)

TX-2020 GL Specification

Item

Dual Chiller Model

spec

CH 1

CH 2

1

Fluid

GL

GL

2

Temp. Range (deg.C)

-20~+80degC

-20~+80degC

3

Max Cooling Capacity
KW @ ℃

3Kw(@15℃ 60Hz)

3Kw(@ 15℃ 60Hz)

4

Max Heating Capacity
KW @ ℃

2.5KW

2.5KW

5

Pump capacity
GPM @ Psi(60Hz)

20liter/min at 0.5Mpa(60Hz)

20liter/min at 0.5Mpa(60Hz)

6

 Power
(Voltage/Current)

3-phase  208V，40A

7

Power Consumption
(KW )

4.5KW/h

4.5KW/h

8

 Safety Design
1.Over Current sensor
2.Leak Sensor

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

9

防漏設計

Magnet Pump

Magnet Pump

10

節能設計
1. Heat Exchanger
2. Pump
3. Heater

1.多餘冷量與PCW進行熱交換
2.變頻
3.PID調整功率           

1.多餘冷量與PCW進行熱交換
2.變頻
3.PID調整功率           

11

Pump Type/
Power Consumption

SPECK-4281   1.5KW

SPECK-4281   1.5KW

12

Chiller Control Method

PID

PID

13

DI Tank

Y

Y

14

是否需定期更換Filter

Y

Y

15

Size(W*D*H)

660*960*1500mm

660*960*1500mm

16

CXF prevention

Y

Y

17

Fluid purge function

N

N

18

符合規範之 SEMI-S2

Y

Y