TX-150DI

機 台 型 號: TX-150DI

機台出廠前均會進行完整測試SOP,以確認正常使用下均能正常運作。

訂購請洽詢客服

 

  • TX Series is designed to meet 200mm and 300mm OEM tool specifications
  • Wide temperature range(-10℃ ~ +65℃)  
  • Circulating fluid DI/EG.
  • All stainless pump
  • User-friendly touch panel display with multiple functions
  • Small foot print
  • Multiple interfaces (RS-232C/RS-485, Digital, Analog, and others)
  • SEMI S2 and F-47 comliant
  • Central monitoring system (CMS)(optional)
 

TX-150DI Specification

Item

Chiiler Model

spec

1

Fluid

DI

2

Temp. Range (deg.C)

-10~+65degC

3

Max Cooling Capacity KW @

3Kw(at 20℃ 60Hz)

4

Max Heating Capacity KW @

2Kw

5

Pump capacity GPM @ Psi(60Hz)

25 liter/min at 0.35Mpa(60Hz)

6

 Power (Voltage/Current)

1-phase  208V,30A

7

Power Consumption (KW )

3KW/h

8

 Safety Design

1. High temp. : Thermostat
2. Empty protection : Float switch
3. Low level : Float switch
4. Pump overload : Thermal relay
5. Pump pressure : Pressure switch
6. Low flow Alarm : Flow meter
7. Phase rotation : Phase rotation detective
8. Sensor protection : Abnormal sensor diagnosing
9. Refrigerator overload : Thermal relay
10. Refrigerator pressure : Pressure sensor
11. Emergency stop : EMO switch
12. Circuit breaker : Over-current breaker

9

防漏設計

Stainless steel pump

10

節能設計
1. Heat Exchanger
2. Pump
3. Heater

1.多餘冷量與PCW進行熱交換

2.變頻

3.PID調整功率

11

Pump Type/Power Consumption

All stainless pump
1.1Kw(60Hz)

12

Chiller Control Method

PID

13

DI Tank

N

14

是否需定期更換Filter

Y

15

Size(W*D*H)

484*760*1200mm

16

CXF prevention

Y

17

Fluid purge function

N

18

符合規範之 SEMI-S2

Y